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匯出:
Excel格式
期刊論文
Wen-Hsi Lee; Tai-Chen Kuo; Chen-Ru Kuo; Pandi Divya , “A Study on Environmentally Friendly Electroless-Plating” ,
2024
,
Journal of Electrochemistry and Plating Technology
, p.2-4.
(SCI期刊)
Tai-Chen Kuo; Chao-Yi Lin; Wen-Hsi Lee , “Effect of Two-Step Ion Implantation and Microwave Annealing on Dopants Activation in Silicon-Germanium ” ,
2019
,
Journal of Material Sciences & Engineering
, vol.8 , p.1-6.
(SCI期刊)
Tai-Chen Kuo; Kai-Jyun Jhong; Chia-Wei Lin; Wen-Hsi Lee , “Effect of Annealing Conditions on Dopants Activation and Stress Conservation in Silicon-Germanium ” ,
2019
,
AIP Advances
, vol.9 , p.1-7.
(SCI期刊)
Tai-Chen Kuo; Tzu-Lang Shih; Yin-Hsien Su; Wen-Hsi Lee; Michael Ira Current; Seiji Samukawa , “Neutral beam and ICP etching of HKMG MOS capacitors: Observations and a plasma-induced damage model ” ,
2018
,
Journal of Applied Physics
, vol.123 , p.1-6.
(SCI期刊)
Tzu-Lang Shih; Yin-Hsien Su; Tai-Chen Kuo; Wen-Hsi Lee; Michael Ira Current , “Effect of microwave annealing on electrical characteristics of TiN/Al/TiN/HfO2/Si MOS capacitors ” ,
2017
,
Applied Physics Letters
, vol.111 , p.1-5.
(SCI期刊)
Yin-Hsien Su; Tai-Chen Kuo; Wen-Hsi Lee; Yu-Sheng Wang; Chi-Cheng Hung; Wei-Hsiang Tseng; Kuo-Hsiu Wei; Ying-Lang Wang , “Effect of tungsten incorporation in cobalt tungsten alloys as seedless diffusion barrier materials ” ,
2017
,
Microelectronic Engineering
, vol.171 , p.25-30.
(SCI期刊)
Tai-Chen Kuo; Yin-Hsien Su; Wen-Hsi Lee; Wei -Hsiang Liao; Yu-Sheng Wang; Chi-Cheng Hung; Ying-Lang Wang , “A study on the plating and wetting ability of ruthenium-tungsten multilayers for advanced Cu metallization ” ,
2016
,
Microelectronic Engineering
, vol.162 , p.27-33.
(SCI期刊)
研討會論文
Tai-Chen Kuo; Wen-His Lee , “Exploring Dopant Dynamics in Crystalline Germanium through Microwave Annealing (MWA) and High-Pressure Annealing (HPA): A Study on Diffusion, Activation, and Recrystallization” ,
2024
,
2024 Materials Research Society
, 2024 /4 /22 ~ 2024 /4 /26 , United States .
Tai-Chen Kuo; Chao-Yi Lin; Wen-Hsi Lee; Ger-Pin Lin; Shao-Yu Hu; Steve Walther; Yi-Hsiang Su; Sandeep Mehta , “High Dopant Activation of Boron in SiGe with two-step Implantation and Microwave Annealing ” ,
2018
,
2018 22nd International Conference on Ion Implantation Technology (IIT)
, 2018 /9 /16 ~ 2018 /9 /21 , Federal Republic of Germany .
Yin-Hsien Su; Tai-Chen Kuo; Wen-Hsi Lee; Yao-Ren Lee , “Investigation of high-k/metal gate MOS capacitors annealed by microwave annealing as a post-metal annealing process ” ,
2016
,
2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)
, 2016 /8 /22 ~ 2016 /8 /25 , Japan .
Tai-Chen Kuo; Tzu-Lang Shih; Yin-Hsien Su; Wen-Hsi Lee; Wei-Hsiang Liao , “Investigation the plating and wetting ability of reactive sputtered Molybdenum-Tungsten multi-layers for advanced Cu metallization ” ,
2016
,
2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)
, 2016 /8 /22 ~ 2016 /8 /25 , Japan .
專書
Hao-Long Chen; Yeou-Yih Tsai; Tai-Chen Kuo; Yee-Shin Chang ,
編著者
, “The photoluminescent properties of La3+ ion-doped YInGe2O7 self-activated phosphor ” , CRC Press ,
2015
, 9780429226410 .